Title:
インゴットブロックの複合面取り加工装置
Document Type and Number:
Japanese Patent JP5517156
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a compound chamfering device of a silicon ingot block of which throughput time is short, and foot print is small.SOLUTION: In the compound chamfering device 1, four corner round faces of a prismatic ingot obtained by stripping four side faces of a column-shaped ingot block with a pair of rotating blades 91a, 91b of a slicer device are roughly cut and chamfered by a pair of cup-wheel type first grinding wheels 11g, 11g, the four side faces of the block are chamfered to be finished by a pair of cup-wheel type second grinding wheels 10g, 10g, and the four corner round faces of the block are finished by a grinding wheel 9g, thus producing the prismatic ingot block.
Inventors:
Yutaka Yoshida
Kazuo Kobayashi
Shuji Takeda
Hiroshi Saito
Satoru Ide
Fumio Kubo
Kazuo Kobayashi
Shuji Takeda
Hiroshi Saito
Satoru Ide
Fumio Kubo
Application Number:
JP2010061844A
Publication Date:
June 11, 2014
Filing Date:
March 18, 2010
Export Citation:
Assignee:
Okamoto Machine Tool Co., Ltd.
International Classes:
B24B9/00; B24B5/02; B24B9/10; B24B41/02; B24B47/20; H01L21/304
Domestic Patent References:
| JP62190731A | ||||
| JP2006102867A |
Foreign References:
| WO2009084101A1 |