Title:
インゴット切断装置及び切断方法
Document Type and Number:
Japanese Patent JP5217918
Kind Code:
B2
Abstract:
An ingot cutting apparatus having at least one coolant pocket storing the coolant to be supplied to the blade, wherein the blade-abrasive-grain portion is brought into contact with the coolant stored in the at least one coolant pocket by causing the blade-abrasive-grain portion of the blade to travel through a groove portion provided at an upper portion of the at least one coolant pocket while driving to rotate the blade so that the coolant is supplied to the blade.
Inventors:
Hidehiko Nishino
Yoshihiro Hirano
Kakuda Shigeharu
Yoshihiro Hirano
Kakuda Shigeharu
Application Number:
JP2008286138A
Publication Date:
June 19, 2013
Filing Date:
November 07, 2008
Export Citation:
Assignee:
Shin-Etsu Semiconductor Co., Ltd.
International Classes:
H01L21/304; B23D59/04; B28D5/04
Domestic Patent References:
| JP11198020A | ||||
| JP9183118A | ||||
| JP1316162A | ||||
| JP2007054913A | ||||
| JP2000334653A | ||||
| JP2008080734A |
Attorney, Agent or Firm:
Mikio Yoshimiya