Title:
Ingot
Document Type and Number:
Japanese Patent JP6237869
Kind Code:
B2
More Like This:
Inventors:
Ben Hori
Nobu Sasaki
Shunsuke Ueda
Tomohiro Kawase
Nobu Sasaki
Shunsuke Ueda
Tomohiro Kawase
Application Number:
JP2016246833A
Publication Date:
November 29, 2017
Filing Date:
December 20, 2016
Export Citation:
Assignee:
Sumitomo Electric Industries, Ltd.
International Classes:
C30B29/36; H01L21/205
Domestic Patent References:
JP2011256096A | ||||
JP2011241146A | ||||
JP9059085A | ||||
JP2005132703A | ||||
JP2012121749A | ||||
JP2000319099A |
Attorney, Agent or Firm:
Fukami patent office
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