Title:
INK-JET RECORDING HEAD AND ITS MANUFACTURE
Document Type and Number:
Japanese Patent JP3520728
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To restrict a warp or distortion of a substrate, highly accurately pattern elements, easily fit a chip having required elements to a base, and improve adhesion of the substrate and a nozzle plate.
SOLUTION: There are provided a piezoelectric body element 20 formed on a silicon substrate 11, an ink cavity 18 formed at a position corresponding to the piezoelectric body element 20 formed on the silicon substrate 11, and a nozzle plate 26 having a discharge opening 25 through which the ink stored in the ink cavity 18 is discharged. An intermediate film 17 having nearly the same thermal expansion coefficient as a lower electrode 14 constituting the piezoelectric body element 20 is interposed between the silicon substrate 11 and nozzle plate 26.
Inventors:
Shimada, Katsuto
Application Number:
JP18849897A
Publication Date:
April 19, 2004
Filing Date:
July 14, 1997
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
B41J2/045; B41J2/055; B41J2/16; (IPC1-7): B41J2/045; B41J2/055; B41J2/16
Attorney, Agent or Firm:
上柳 雅誉 （外１名）
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