Title:
インクジェット印刷可能なエッチングインク及び関連する方法
Document Type and Number:
Japanese Patent JP5827623
Kind Code:
B2
Abstract:
The present invention refers to a method for contactless deposition of new etching compositions onto surfaces of semiconductor devices as well as to the subsequent etching of functional layers being located on top of these semiconductor devices. Said functional layers may serve as surface passivation layers and/or anti-reflective coatings (ARCs).
Inventors:
Doll, Oliver
Plummer, Edward
James, Mark
Koehler, Ingo
Nanson, Lana
Plummer, Edward
James, Mark
Koehler, Ingo
Nanson, Lana
Application Number:
JP2012529136A
Publication Date:
December 02, 2015
Filing Date:
August 20, 2010
Export Citation:
Assignee:
Merck Patent Gesellschaft mit beschraenkter Haftung
International Classes:
H01L21/308; C09D11/00; C09K13/08
Domestic Patent References:
| JP2008541447A | ||||
| JP2005537680A |
Foreign References:
| WO2009094711A1 |
Attorney, Agent or Firm:
Akio Miyazaki
Masaaki Ogata
Masaaki Ogata