Title:
INLINE CURE FURNACE MECHANISM
Document Type and Number:
Japanese Patent JP3613954
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To prevent surface oxidation of a frame, by comprising a mechanism for raising/lowering a transportation rail in a cure furnace, for moving the frame from above a cure heater after completion of curing in the cure furnace.
SOLUTION: Upon completion of curing, a flame 3 is receded from a cure heater 6 by rising of an in/cure furnace transportation rail 9, and returned to a frame transportation position. At the frame transportation position, the frame 3 waits for unloading until a frame temperature falls to such temperature as no oxidation reaction occurs or below from a high temperature state after cure. Since the fact that the frame 3 after cure is taken out of a cure furnace 5 in high temperature condition is eliminated, the frame surface oxidation when the frame 3 is taken out of the cure furnace 5 does not take place.
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Inventors:
Daisuke Maruyama
Application Number:
JP33221397A
Publication Date:
January 26, 2005
Filing Date:
December 02, 1997
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
C21D1/74; F27D7/06; H01L23/40; H01L23/50; (IPC1-7): H01L23/50
Domestic Patent References:
| JP8222678A |
Attorney, Agent or Firm:
Masahiko Ueyanagi
Osamu Suzawa
Osamu Suzawa