Title:
管状脆性材料の内表面研摩方法および該研摩方法で得られた管状脆性材料
Document Type and Number:
Japanese Patent JP2006517471
Kind Code:
A
Abstract:
An object of the present invention is to provide a polishing method for producing, in a relatively short period of time, a tubular brittle material having an inner surface of high surface precision with a maximum roughness Rmax of 0.1 mum or smaller and a center line average roughness Ra of 0.01 mum or smaller, and to provide a tubular brittle material with high precision using said polishing method. The polishing method according to the invention is characterized by that the inner surface of the tubular material being pre-cut into a tubular shape using a honing machine is further polished with a sheet material having diamond abrasives attached thereon. Also claimed is a tubular brittle material obtained by said polishing method.
Inventors:
Takeo Tsuburaya
Masanori Suzuki
Masanori Suzuki
Application Number:
JP2006501810A
Publication Date:
July 27, 2006
Filing Date:
February 11, 2004
Export Citation:
Assignee:
Shin-Etsu Quartz Products Co., Ltd.
International Classes:
B24B33/02; B24B5/40; B24B19/00; B24B33/08; B24D3/00; B24D7/18; B24D11/00
Domestic Patent References:
| JP2000203860A | 2000-07-25 | |||
| JPH02237762A | 1990-09-20 | |||
| JP2003019655A | 2003-01-21 | |||
| JPH05138526A | 1993-06-01 | |||
| JPS5822245U | 1983-02-10 | |||
| JP2000119034A | 2000-04-25 | |||
| JPH0398769A | 1991-04-24 | |||
| JP2001328831A | 2001-11-27 |
Attorney, Agent or Firm:
Heihachi Hattori