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Title:
INNER WALL MEMBER
Document Type and Number:
Japanese Patent JP2014031938
Kind Code:
A
Abstract:

To provide an inner wall member having a structure that hardly causes warping, has high strength even if it is silicified, and does not become significantly broken.

An inner wall member 1 is used in a silicon carbide baking furnace 10. The baking furnace 10 has a double structure made up of an outer wall 11 and an inner wall 12, and heaters 13 and silicon carbide molded bodies 14 to be processed are housed inside the inner wall 12. The silicon carbide molded bodies 14 are placed on a tray 15. The inner wall member 1 made of graphite has a step part 2 in an inner surface 1S of the inner wall member 1. The step part 2 consists of a first plane 21, a rising surface 22, and a second plane 23. A plurality of concave portions 24 are formed on the second plane 23, and the second plane 23 serves as a convex portion so that a plurality of uneven shapes are formed. If the step part 2 is provided, a three-dimensional silicon carbide layer 30 is formed on the surface after use for a long period.


Inventors:
FURUKAWA SHIGEMI
KODERA TOSHIHIRO
TOKORO MASAYA
Application Number:
JP2012172227A
Publication Date:
February 20, 2014
Filing Date:
August 02, 2012
Export Citation:
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Assignee:
IBIDEN CO LTD
International Classes:
F27D1/04; F27B5/10; C01B31/04
Domestic Patent References:
JP2006046865A2006-02-16
Foreign References:
WO2012015132A12012-02-02
Attorney, Agent or Firm:
Yuriko Hamada
Shohei Oguri
Hironori Honda
Toshimitsu Ichikawa