Title:
INORGANIC COMPOUND THIN FILM FORMING DEVICE
Document Type and Number:
Japanese Patent JPS5420973
Kind Code:
A
Abstract:
PURPOSE: To make the maintenance of plasma easy and make it possible to regulate the thickness of an inorg. cpd. thin film and the rate of forming the film in a wide range by separately providing a thermoelectron emitting filament as an electron supply source and a melting mechanism for melting and evaporating solid raw material such as a metal or boron.
Inventors:
MORI HIDEFUMI
YOSHIHARA HIDEO
KIUCHI MIKIHO
YOSHIHARA HIDEO
KIUCHI MIKIHO
Application Number:
JP8509577A
Publication Date:
February 16, 1979
Filing Date:
July 18, 1977
Export Citation:
Assignee:
NIPPON TELEGRAPH & TELEPHONE
International Classes:
C23C14/06; C23C14/00; C23C14/32; (IPC1-7): C23C13/04; C23C13/08