PURPOSE: To improve the uniform dispersibility of inorg. powder in an org. binder without giving any influence on the fine structure of the inorg. powder by synthesizing a plasma-polymerized film on the surface of the inorg. powder.
CONSTITUTION: Rotary joints 14, 15 are removed and the inorg. powder to be treated such as iron oxide powder or the like is charged into a reaction vessel R. The inside of the vessel is evacuated with a hydraulic rotary pump 12. A gaseous monomer such as ethylene and a gaseous carrier such as Ar are supplied into the vessel, and the degree of vacuum in the vessel is maintained in a 0.01W 10Torr range by a controller 13. The vessel R is rotated and a high frequency is applied through electrodes 7, 7' from a high frequency power source 6. The supply rates of the gaseous monomer and the gaseous carrier are beforehand determined according to the amt. of the powder to the charged and a desired film thickness, and the point of the time when the plasma disappears is determined as the end point of reaction. The gas mixed with the plasma is penetrated through the powder dispersed and suspended in the vessel by the rotation of the vessel R, whereby the plasma-polymerized thin film having good adhesion is formed uniformly on the surface thereof.
MORITA HARUYUKI
KUBOTA YUUICHI
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