Title:
INSPECTING APPARATUS FOR BREAKING AND SHORT OF BAND TYPE PARALLEL ELECTRODE
Document Type and Number:
Japanese Patent JPS5320980
Kind Code:
A
Abstract:
PURPOSE: To carry out quickly and conveniently inspection for breaking, short, etc., by causing parallel motion of two probes to scan matrix electrodes, etc., which composes plasma indicator element, etc.
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Inventors:
OGAWA FUMIHIRO
KATOU KATSUMI
KATOU KATSUMI
Application Number:
JP9584876A
Publication Date:
February 25, 1978
Filing Date:
August 11, 1976
Export Citation:
Assignee:
NIPPON ELECTRIC CO
NIPPON TELEGRAPH & TELEPHONE
NIPPON TELEGRAPH & TELEPHONE
International Classes:
G01R31/02; G01R1/06; (IPC1-7): G01R1/06; G01R31/02