Title:
INSPECTING APPARATUS OF EXTRANEOUS SUBSTANCE
Document Type and Number:
Japanese Patent JP3218727
Kind Code:
B2
Abstract:
PURPOSE: To obtain an inspecting apparatus of an extraneous substance which can discriminate the extraneous substance from a circuit pattern with high precision, not depending on the direction of arrangement and the pitch of the pattern formed on a surface to be inspected.
CONSTITUTION: A partial reflection mirror 7 having a transmitting part in one place at least is provided obliquely at an eye position (eye position of a Fourier transform lens 6) of a light-sensing optical system which senses a light generated from an object 2 of inspection by application of a light beam. The light reflected by the mirror 7 forms an image of an eye plane on a two-dimensional image pickup element 11, while the light transmitted through the mirror 7 is detected by an image pickup means 9. By driving the mirror 7 so that the light-transmitting part of the mirror 7 be positioned at a position at which no diffractive pattern is present, on the basis of image information from the image pickup element 11, only an extraneous substance scattered light is detected by the image pickup means 9.
Inventors:
Kinya Kato
Application Number:
JP26555592A
Publication Date:
October 15, 2001
Filing Date:
September 09, 1992
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G01N21/88; G01N21/94; G01N21/956; (IPC1-7): G01N21/956
Domestic Patent References:
| JP1180067A | ||||
| JP2114386A | ||||
| JP55124008A | ||||
| JP63205775A |
Attorney, Agent or Firm:
Yoshio Inoue