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Title:
INSPECTING APPARATUS
Document Type and Number:
Japanese Patent JPS57188239
Kind Code:
A
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Inventors:
NAGATA SABUROU
Application Number:
JP7278081A
Publication Date:
November 19, 1982
Filing Date:
May 14, 1981
Export Citation:
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Assignee:
CANON KK
International Classes:
A61B5/12; A61B5/00; A61B10/00; (IPC1-7): A61B5/00; A61B5/12



 
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