PURPOSE: To ensure the judgement of defects, by projecting infrared rays on a substrate, on which transparent electrodes are formed, utilizing the difference in intensity of transmitted light, and detecting the position and shape of the transparent electrode pattern as a function of position on the substrate.
CONSTITUTION: On a glass substrate 1, on which transparent electrodes 2 are formed, infrared rays 4a are projected from an infrared-ray generating element 3a. The transmitted light rays are detected by an infrared-ray detecting element 5a. The element 3a is moved to a position 3b, and the detecting element 5a is moved to a position 5b. The transmitted light rays through a part of the substrate 1, where the electrode 2 is not present, are detected. By utilizing the difference in intensities of both light rays, the substrate 1 is moved. Then, the width L of the electrode 2 and the interval M between the electrodes 2 are measured. Thus the presence or absence of defects of the pattern is inspected.
NISHIKAWA MASAHIRO
TODA TAKAO
MATSUOKA TOMIZO
FUJITA YOSUKE
KUWATA JUN
NITTA KOJI
