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Title:
INSPECTION APPARATUS OF CUT FACE OF CRYSTAL PLATE
Document Type and Number:
Japanese Patent JPH06174662
Kind Code:
A
Abstract:

PURPOSE: To hold a crystal plate of any shape and size by sucking and thereby to enable inspection of a cut face in an inspection apparatus of the cut face of the crystal plate.

CONSTITUTION: An inspection apparatus of a cut face of a crystal plate which inspects an angle of the cut face of the crystal plate 8 to a crystal lattice plane inside the crystal plate 8 and which has a crystal plate support stage 1 whereon the crystal plate 8 is set, an X-ray source 2 for applying an X ray to the crystal plate 8 set on the crystal plate support stage 1, and an X-ray counter 3 for detecting the X ray diffracted by the crystal plate 8. Moreover, this apparatus has three linear projections 6 provided on the crystal plate support stage 1 and extending radially from a point Q as the center and air holes 7 for sucking the crystal plate which are opened in the surface of the crystal plate support stage 1.


Inventors:
MACHITANI YOSHIRO
Application Number:
JP35267492A
Publication Date:
June 24, 1994
Filing Date:
December 10, 1992
Export Citation:
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Assignee:
RIGAKU DENKI CO LTD
International Classes:
G01N23/207; (IPC1-7): G01N23/207
Attorney, Agent or Firm:
Kuniaki Yokokawa