To provide a technique for improving detection accuracy of an inspection apparatus.
An inspection apparatus 100 comprises: an irradiation part 101 irradiating a sample surface with a beam obtained by pulse oscillation from a laser source; a detection part 102 receiving light generated by the irradiation from the sample surface, and generating and outputting a detection signal; and a detection control part 104 generating a gate signal (G) for controlling the input/output of the detection part 102 and applying the gate signal to the detection part 102, in accordance with a pulse oscillation timing of the irradiation part 101. The detection part 102 receives light at a timing according to the gate signal (G), and generates and outputs the detection signal.
JINGU TAKAHIRO
JP2005536732A | 2005-12-02 | |||
JP2012132791A | 2012-07-12 | |||
JPH05306906A | 1993-11-19 | |||
JP2000338048A | 2000-12-08 | |||
JP2007101227A | 2007-04-19 | |||
JP2003130808A | 2003-05-08 | |||
JP2008020359A | 2008-01-31 | |||
JP2007122507A | 2007-05-17 |
Next Patent: ELECTRONIC CIRCUIT DEVICE