Title:
INSPECTION APPARATUS AND INSPECTION METHOD
Document Type and Number:
Japanese Patent JP2021148545
Kind Code:
A
Abstract:
To provide an inspection apparatus capable of detecting an isophote in the Gaussian distribution of a laser beam with high accuracy.SOLUTION: An inspection apparatus 2 comprises: a dimming plate 6 that dims a laser beam LB immediately after an oscillator 4 oscillates; imaging means 8 that images the laser beam LB dimmed by the dimming plate 6 with a plurality of pixels; processing means 10 that processes an image captured by the imaging means 8; and display means 12 that displays the image processed by the processing means 10. The processing means 10 includes at least two thresholds of an inner ring 14 and an outer ring 18 for partitioning intensity of the laser beam LB. The display means 12 displays the inner ring 14 and the outer ring 18.SELECTED DRAWING: Figure 1
Inventors:
MORIKAZU YOJI
Application Number:
JP2020047561A
Publication Date:
September 27, 2021
Filing Date:
March 18, 2020
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
G01J1/42; G01J1/02; G01M11/00
Attorney, Agent or Firm:
Naozumi Ono
Sachiko Okunuki
Kojino Koji
Yoshifumi Kaneko
Sachiko Okunuki
Kojino Koji
Yoshifumi Kaneko