Title:
検査用データ作成装置および検査用データ作成方法
Document Type and Number:
Japanese Patent JP6821458
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To make it possible to facilitate a preparation of reasonable individual inspection data.SOLUTION: An inspection data preparation device is configured to: execute determination reference value calculation processing 86 calculating a determination reference value on the basis of a first differential value between a non-defective product actual measurement result obtained by actually conducting an inspection with one inspection content with respect to a circuit network of an inspection object substrate of a non-defective product and a normal-time inspection result obtained by normal-time simulation processing 84 with the inspection content; in an individual inspection data preparation processing 87, compare the determination reference value with a second differential value between the normal-time inspection result by the normal-time simulation processing 84 with the inspection content and a failure-time inspection result obtained by failure-time simulation processing 85 with the inspection content; when the second differential value exceeds the determination reference value, discriminate that the normal-time inspection result and the failure-time inspection result are different; and determine the inspection content as individual inspection data.SELECTED DRAWING: Figure 3
Inventors:
Goro Takeuchi
Application Number:
JP2017020189A
Publication Date:
January 27, 2021
Filing Date:
February 07, 2017
Export Citation:
Assignee:
Hioki Electric Co., Ltd.
International Classes:
G01R31/3183; G01R31/28
Domestic Patent References:
| JP2016194477A | ||||
| JP2016173354A | ||||
| JP201644991A | ||||
| JP2128171A | ||||
| JP2006329824A | ||||
| JP1172768A | ||||
| JP6416974A |
Attorney, Agent or Firm:
Shinji Sakai