Title:
透明基板端面部の検査装置およびその検査方法
Document Type and Number:
Japanese Patent JP3967759
Kind Code:
B2
Abstract:
An inspection apparatus for inspecting an end face of a transparent substrate and an inspection method for inspecting an end face of a transparent substrate according to the present invention are capable of reliably and accurately detecting defects at the end face of the transparent substrate. When a display panel substrate 10 which is a transparent substrate is placed on a rotating table 21, a light is intermittently emitted from an end-face illuminating unit 39 arranged opposite to the end face of the display panel substrate 10. The light emitted along the surface of the substrate 10 is reflected from a lower reflecting mirror 42 toward the end face of the transparent substrate 10. The end face and an adjacent portion thereof are imaged by a CCD camera 36. Defects at the end face of the display panel substrate 10 are detected based on an image density of each pixel in the obtained image data.
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Inventors:
Junichi Matsumoto
Application Number:
JP2005503078A
Publication Date:
August 29, 2007
Filing Date:
March 03, 2004
Export Citation:
Assignee:
Samsung Diamond Industry Co., Ltd.
International Classes:
G01N21/958; G02F1/13; G01N21/95
Domestic Patent References:
| JP2002214157A | ||||
| JP6258231A | ||||
| JP10213551A | ||||
| JP10132758A | ||||
| JP2003247953A | ||||
| JP2003270170A |
Attorney, Agent or Firm:
Hidesaku Yamamoto
Takaaki Yasumura
Natsuki Morishita
Takaaki Yasumura
Natsuki Morishita
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