Title:
INSPECTION DEVICE, INSPECTION METHOD, AND INSPECTION PROGRAM
Document Type and Number:
Japanese Patent JP2023090238
Kind Code:
A
Abstract:
To provide an inspection device, an inspection method and an inspection program with which it is possible to accurately inspect a sealed container for airtightness even when there is a variation for each sealed container in the concentration of a gas in an internal space of the sealed container.SOLUTION: The inspection device comprises: a conveyance unit for conveying a vial which is sealed up, with its headspace replaced with a gas; a laser generation unit for emitting a laser beam in a prescribed wavelength to the headspace of the vial being conveyed; a laser reception unit for receiving the laser beam; a gas concentration measurement unit for measuring an oxygen concentration in the headspace on the basis of the absorbed amount of prescribed wavelength of the laser beam having passed through the headspace and received by the laser reception unit; an identification unit for identifying each individual vial; a storage unit for storing the measured oxygen concentration for each vial; and an assessment unit which, with oxygen concentrations measured twice for the same vial, assesses the airtightness of the vial based on the comparison of the oxygen concentration measured for the first time with the oxygen concentration measured for the second time.SELECTED DRAWING: Figure 3
Inventors:
WAKANO HIROKI
Application Number:
JP2021205106A
Publication Date:
June 29, 2023
Filing Date:
December 17, 2021
Export Citation:
Assignee:
ANRITSU CORP
International Classes:
G01N21/3504; G01M3/38; G01N21/39
Attorney, Agent or Firm:
Patent Attorney Corporation Nissei International Patent Office
Previous Patent: JPWO2023090237
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