Title:
検査装置及び検査方法
Document Type and Number:
Japanese Patent JP7236840
Kind Code:
B2
Abstract:
In an inspection apparatus for inspecting an inspection target device formed on an inspection object, the inspection target device is a back-illuminated imaging device into which light is incident from a rear surface opposite to a side of a wiring layer. The inspection apparatus includes a stage having the inspection object placed such that the inspection object faces the rear surface. The stage includes a light transmitter made of a light-transmissive material. The inspection object is placed on the light transmitter below which a light illuminator is disposed. The light illuminator includes a flat light guide plate having a facing surface facing the inspection object. A light source is provided laterally outside the light guide plate configured to diffuse light emitted from the light source incident from a side end surface of the light guide plate, and to emit the light as planar light from the facing surface.
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Inventors:
Naoki Akiyama
Susumu Saito
Hiroyuki Nakayama
Shigeru Kasai
Susumu Saito
Hiroyuki Nakayama
Shigeru Kasai
Application Number:
JP2018201073A
Publication Date:
March 10, 2023
Filing Date:
October 25, 2018
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/66; G01R31/28; H01L27/146
Domestic Patent References:
| JP2009170730A | ||||
| JP9021916A | ||||
| JP2004287368A |
Attorney, Agent or Firm:
Kanemoto Tetsuo
Koji Hagiwara
Naoki Ogita
Koji Hagiwara
Naoki Ogita
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