To provide an inspection device and an inspection method of a periodic structure substrate, which inspect a defect generated in a periodic structure formed on a semiconductor related component, a liquid crystal related component or the like.

The inspection device of the periodic structure substrate is equipped with: a linear light source for illuminating a base on which the periodic structure is formed, a linear sensor for detecting diffracted light generated from the substrate surface, and a conveyance means for performing image detection of the substrate surface from a detection signal from the linear sensor. The inspection device of the periodic structure substrate is characterized in that each line direction of the linear sensor and the linear light source is formed vertically to the array direction of the periodic structure.

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