INSPECTION DEVICE AND INSPECTION METHOD

Japanese Patent JP2017150992

A

PROBLEM TO BE SOLVED: To provide a device for accurately inspecting a first plane of an inspection object having an open hole and a second plane that is the reverse side of the first plane.SOLUTION: An inspection device comprises: a first illumination 11 for irradiating a first plane 601; a first polarizer 12 for allowing a beam of light irradiated by the first illumination to pass through and having a first polarization angle; a first imaging sensor 13 arranged on the first plane side; a second polarizer 14 arranged facing the first imaging sensor; a second illumination 21 for irradiating a second plane 602; a third polarizer 22 for allowing a beam of light irradiated by the second illumination to pass through and having a second polarization angle different from the first polarization angle; a second imaging sensor 23 arranged on the second plane side; and a fourth polarizer 24 arranged facing the second imaging sensor. The second polarizer has a polarization angle to allow a beam of light having passed through the first polarizer and having been reflected on the first plane to pass through and shut off a beam of light having passed through the third polarizer. The fourth polarizer has a polarization angle to allow a beam of light having passed through the third polarizer and having been reflected on the second plane to pass through and shut off a beam of light having passed through the first polarizer.SELECTED DRAWING: Figure 1

HIRAMOTO KAZUKO
OBA HIDETOSHI
YANASE TAKESHI

JP2016034746A

August 31, 2017

February 25, 2016

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FUJITSU LTD

G01N21/88; G01B11/30

Shuhei Katayama

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