Title:
INSPECTION DEVICE, TEST JIG, AND TEST METHOD
Document Type and Number:
Japanese Patent JP2005292090
Kind Code:
A
Abstract:
To improve an inspection precision and inspection efficiency in the case of inspecting the electrical property of the sensor of electrostatic capacitance type.
The inspection device for inspecting the electric property of the sensor 101 by making a conductor contact on the surface of the sensor 101 comprises the liquid film forming part 31 for spraying volatile liquid on the surface of the sensor 101 for forming liquid film as the conductor.
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Inventors:
KOBAYASHI SEIJI
Application Number:
JP2004111428A
Publication Date:
October 20, 2005
Filing Date:
April 05, 2004
Export Citation:
Assignee:
SONY CORP
International Classes:
G01B7/28; A61B5/117; G01R27/26; G01R31/26; (IPC1-7): G01R27/26; A61B5/117; G01R31/26
Attorney, Agent or Firm:
Takahisa Sato
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