Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
INSPECTION DEVICE AND TRANSPORT DEVICE
Document Type and Number:
Japanese Patent JP2013092404
Kind Code:
A
Abstract:

To provide an inspection device with high productivity, and a transport device.

An inspection device includes: an illumination stage 22 that supports and illuminates a substrate 10 between a front-stage transport belt 21 and a rear-stage transport belt 23; a crank mechanism 32 that has a transfer unit 31 for lifting the substrate 10 and performs operation for delivering the substrate 10 from the front-stage transport belt 21 to the illumination stage 22 and delivering the substrate 10 from the illumination stage 22 to the rear-stage transport belt 23; an illumination unit 31a that is provided to the transfer unit 31 and projects illumination light toward the substrate 10 lifted by the transfer unit 31 from a lower side thereof; and an imaging unit 35 that picks up an image of one substrate 10 illuminated by the illumination stage 22 and the illumination unit 31a during the time when one substrate 10 is transferred from the front-stage transport belt 21 to the rear-stage transport belt 23 via the illumination stage 22.


Inventors:
KITAHARA MASARU
Application Number:
JP2011233496A
Publication Date:
May 16, 2013
Filing Date:
October 25, 2011
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
SHIMADZU CORP
International Classes:
G01N21/84; B65G47/52; G01N21/956
Attorney, Agent or Firm:
Ken Ieiri
Yasuhiro Iwase