Title:
INSPECTION DEVICE
Document Type and Number:
Japanese Patent JP2001330563
Kind Code:
A
Abstract:
To provide an efficient and low-cost semiconductor inspection device.
An electro-optical system lens-barrel 4 of inspection SM and an optical system lens-barrel 5 of a Raman analytical mechanism are installed in a common sample chamber 1. In this case, installation is executed so that a focus point of an objective lens of the inspection SM agrees with a laser beam irradiation point of the Raman analytical mechanism, and a stage 3 is driven so that the focus point falls on the surface of a sample 2. A galvanometer scan mirror is mounted on the optical system lens-barrel of the Raman analytical mechanism, to thereby scan the sample 2 by a laser beam from a Raman excitation laser beam source 7.
Inventors:
YAMAGATA MASAYASU
INOGUCHI MASAYUKI
MUROTA MASAO
OKI SADATSUGU
MURAISHI SHUICHI
INOGUCHI MASAYUKI
MUROTA MASAO
OKI SADATSUGU
MURAISHI SHUICHI
Application Number:
JP2000150884A
Publication Date:
November 30, 2001
Filing Date:
May 23, 2000
Export Citation:
Assignee:
JEOL LTD
JEOL SYSTEM TECHNOLOGY CO LTD
NIPPON DENSHI RAIOSONIKKU KK
JEOL SYSTEM TECHNOLOGY CO LTD
NIPPON DENSHI RAIOSONIKKU KK
International Classes:
G01B15/08; G01N21/65; G01N21/956; G01N23/225; G01Q30/02; G01Q60/18; H01J37/28; H01L21/66; G01B15/00; (IPC1-7): G01N21/65; G01B15/00; G01N13/10; G01N13/14; G01N23/225; H01L21/66
Domestic Patent References:
| JPH0719969A | 1995-01-20 | |||
| JPH07128596A | 1995-05-19 | |||
| JPH05231938A | 1993-09-07 | |||
| JPH1151945A | 1999-02-26 | |||
| JPH11237391A | 1999-08-31 | |||
| JP2002514747A | 2002-05-21 |
Foreign References:
| WO1999058939A1 | 1999-11-18 |