Title:
INSPECTION DEVICE
Document Type and Number:
Japanese Patent JP2023131319
Kind Code:
A
Abstract:
To provide an inspection device capable of inspecting an inspection object positioned in a lower layer of a hardly permeable material.SOLUTION: An inspection device includes: a light source for outputting pulse excitation light having a time width from 10 picoseconds to 10 nanoseconds; a nonlinear optical crystal for generating a terahertz wave by the optical wavelength conversion of the excitation light; and a detector for detecting a reflected wave of the terahertz wave reflected by the object to be inspected.SELECTED DRAWING: Figure 1
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Inventors:
YAMAMOTO SHUSAKU
KAJIKAWA KEISUKE
KAMINO YUICHIRO
MINAMIDE YASUTSUGU
NAWATA KOJI
KAJIKAWA KEISUKE
KAMINO YUICHIRO
MINAMIDE YASUTSUGU
NAWATA KOJI
Application Number:
JP2022036002A
Publication Date:
September 22, 2023
Filing Date:
March 09, 2022
Export Citation:
Assignee:
MITSUBISHI HEAVY IND LTD
INSTITUTE PHYSICAL & CHEMICAL RES
INSTITUTE PHYSICAL & CHEMICAL RES
International Classes:
G01N21/3581; G01N21/01; G02F1/35
Attorney, Agent or Firm:
SSIP Patent Attorney Corporation
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