PURPOSE: To make a slip quantity based upon the overdrive quantity of a probe stylus from becoming hard to appear and to enable high-accuracy contacting by bringing the probe stylus into contact with a body to be inspected with stylus pressure generated by a moving mechanism and a recessing mechanism.

CONSTITUTION: A rotary solenoid 18 is driven while a body 6 to be inspected which is fixed to a chuck top is overdriven at the time of inspection. A rotary member 14 is rotated through a crank mechanism 19 to rotate a card main body 12 and the probe stylus 11 is brought into contact in a fine movement state and slowed down, so that the probe stylus 11 can be slowed down right before contacting. When the body to be inspected is given an overdrive quantity, the probe stylus 11 contacts the body 6 to be inspected to enable the highly accurate contacting and the recessing mechanism of a spring 15 absorbs abnormal pressure to bring all probe styli 11 in stable contact.