Title:
INSPECTION DEVICE
Document Type and Number:
Japanese Patent JPS553612
Kind Code:
A
Abstract:
PURPOSE:To facilitate inspection work for ICs and the like in the case of assembling by arranging a microscope 1 used for observing a pellet, a vacuum mechanism for attracting the pellet in this field of view, a switch mechanism for controlling the abovementioned mechanism, and a count indication mechanism for counting the number of times the switch is operated, as shown in the drawings. CONSTITUTION:This device is roughly classified into a microscope body 1 used for observing a pellet 3, a vacuum mechanism 4 and an electromagnetic valve 5 for attracting the pellet 3 on a stage 2, a switch mechanism 6 for actuating the mechanism 8 for displaying the number of times the push button 7 is manipulated. In such construction, an auxiliary stage 19 is fixed on the stage 2 driven by a pulse motor 12 underneath an objective 9, and an accommodation jig 11 containing the pellet 3 is mounted thereon. Checking of the pellet 3 will be made while moving the stage 2. If any defect is found, the accumulated figures are displayed on the indication mechanism 8 when the push button is depressed. Thereafter, rejects will be dropped on a dish 27 due to the operation of a rotary solenoid 16 and the mechanism 4.
Inventors:
YOSHIDA HISASHI
SUZAKI MAMORU
SUZAKI MAMORU
Application Number:
JP7419878A
Publication Date:
January 11, 1980
Filing Date:
June 21, 1978
Export Citation:
Assignee:
HITACHI LTD
HITACHI OME DENSHI KOGYOSHO
HITACHI OME DENSHI KOGYOSHO
International Classes:
H01L21/66; G01R31/26; (IPC1-7): G01R31/26; H01L21/66
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