【発明の名称】ウエ-ハの配列装置

Title:

【発明の名称】ウエ-ハの配列装置

Document Type and Number:

Japanese Patent JP2539418

Kind Code:

B2

Inventors:

SAEKI KAZUNORI
KOYAMA KOJI
ISHII KEIICHI

Application Number:

JP7519387A

Publication Date:

October 02, 1996

Filing Date:

March 28, 1987

Export Citation:

Assignee:

MITSUBISHI MATERIARU KK
MITSUBISHI MATERIARU SHIRIKON KK

International Classes:

H01L21/66; B65G49/07; H01L21/67; H01L21/677; H01L21/68; (IPC1-7): H01L21/68; B65G49/07; H01L21/66

Attorney, Agent or Firm:

Masatake Shiga (1 person outside)

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