Title:
検査装置及び検査方法、露光装置及び露光方法、並びに、デバイス製造方法
Document Type and Number:
Japanese Patent JP7087268
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To estimate the condition of an optical element so as to detect a defect in the optical element.SOLUTION: An inspection apparatus aims to inspect a spatial optical modulator including a plurality of optical elements disposed in an incident region where light can be incident. The inspection apparatus includes: an irradiation device for irradiating a target region that is at least a part of the incident region with inspection light; a detector for detecting diffracted light generated by the irradiation of the target region with the inspection light; and a controller for estimating the condition of at least one optical element by using the detection results of the detector.SELECTED DRAWING: Figure 2
Inventors:
Hidemitsu Toba
Application Number:
JP2017051210A
Publication Date:
June 21, 2022
Filing Date:
March 16, 2017
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G01B11/24; G03F7/20; G01B11/26
Domestic Patent References:
| JP2008091907A | ||||
| JP2010518595A | ||||
| JP2005077390A | ||||
| JP2006148107A | ||||
| JP2012533871A |
Attorney, Agent or Firm:
Tatsuo Egami
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