Title:
検査装置、および検査方法
Document Type and Number:
Japanese Patent JP4870450
Kind Code:
B2
Abstract:
There is a need for inspecting a heightwise variation in a sample. A holder holds a sample. A charge control unit charges the sample held by the holder. A retarding power supply applies a voltage to the sample held by the holder. An electro-optic system radiates an electron beam to the sample applied with a voltage by the retarding power supply and images a mirror electron returning near the surface of the sample. An image processing unit processes a mirror image resulting from imaging the mirror electron. The image processing unit outputs information corresponding to a difference between mirror images, i.e., a mirror image acquired by imaging the mirror electron and a mirror image for a prepared standard preparation, as a heightwise variation in a sample.
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| JPS531594 | CHARGED PARTICLE ANALYZER |
Inventors:
Hiroshi Makino
Masaki Hasegawa
Enyama Hyakuyo
Masaki Hasegawa
Enyama Hyakuyo
Application Number:
JP2006050853A
Publication Date:
February 08, 2012
Filing Date:
February 27, 2006
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
G01N23/225; H01L21/66
Domestic Patent References:
| JP2005292157A | ||||
| JP2005233700A | ||||
| JP2005181246A | ||||
| JP2006032107A | ||||
| JP2005164608A | ||||
| JP2005101619A |
Attorney, Agent or Firm:
Shoyo domestic and overseas patent office