PURPOSE: To provide an inspection equipment for multielectrode device which can easily deal with modification of the device and in which the probe is not affected by the undulation of a substrate to be inspected.

CONSTITUTION: The inspection equipment comprises a stage 14 surrounding the inspection region of a device 10, e.g. an IC or an LSI, having multielectrodes, and an inspection means, e.g. a probe card 22, having probes touchable to respective electrodes of the device 10 is fixed to the stage 14. The stage 14 is provided with a rail mechanism having adjustable interval and each rail in the rail mechanism is provided with a plurality of fixing heads for supporting the inspection means so that the position thereof can be adjusted. Each head is provided with the inspection means which is elevatably/lowering fixed through an elevating/ lowering means and a sensor which stops the elevating/lowering means by detecting the landing of probe.