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Title:
INSPECTION EQUIPMENT
Document Type and Number:
Japanese Patent JPS6112508
Kind Code:
A
Abstract:

PURPOSE: To realize forming an actual pallet by adjusting an object to be inspected at an adjustment section and placing the adjusted object on an empty pallet by an actual pallet forming section.

CONSTITUTION: An object 6 to be inspected, adjusted in an adjustment section 3, is placed on an empty pallet 2A by means of an actual pallet forming section 7 and an actual pallet 2B is formed. Then, by housing the actural pallet 2B on a rotary shelf 11 of a stock section 9, the actual pallet 2B, which is three-dimensional and effectively utilizing a space, is stocked (housed). Subsequently, expected ageing is performed through housing the actual pallet in the stock section or the actural pallet, just loaded with the object to be inspected, onto a rotary shelf 22 of an ageing section 20 according to requirement. At this time, supply to and takeout from the rotary shelf 22 are performed continuously and efficiently by adjusting a time for ageing and a speed of rotation. Subsequently to performing treatment such as cooling and the like in an aftertreatment section 27 for the object 6 to be inspected in the actural pallet 2B taken out, examination and inspection are performed for said object 6 in an examination section 35 and an inspection section 36.


Inventors:
UESHIMO TOSHIHIRO
TAMURA MIKIO
NISHINO SHIGEYUKI
Application Number:
JP13259284A
Publication Date:
January 20, 1986
Filing Date:
June 26, 1984
Export Citation:
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Assignee:
DAIFUKU MACHINERY WORKS
JAPAN RADIO CO LTD
International Classes:
B65G1/00; B23P19/00; B65G1/04; B65G1/133; B65G37/00; H01L21/66; (IPC1-7): B23P19/00; B65G1/00; B65G37/00; H01L21/66
Attorney, Agent or Firm:
Yoshihiro Morimoto



 
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