Title:
ガス供給系の検査方法、流量制御器の校正方法、及び、二次基準器の校正方法
Document Type and Number:
Japanese Patent JP6754648
Kind Code:
B2
Abstract:
A method according to an aspect includes a first step of connecting a reference device to the other end of a connecting pipe, a second step of supplying a gas from one flow controller into piping, a third step of acquiring measured values of a first pressure gauge and a first thermometer, a fourth step of supplying a portion of the gas in piping into a tank, a fifth step of acquiring measured values of the first pressure gauge and the first thermometer or measured values of a second pressure gauge and a second thermometer, and a sixth step of using a Boyle-Charles' law to calculate a volume of the piping on the basis of the measured values acquired in the third step, the measured values acquired in the fifth step, and a volume of a closed space including a space in the tank when the third valve is closed.
Inventors:
Akikura Norihiko
Miyoshi Risako
Miyoshi Risako
Application Number:
JP2016180581A
Publication Date:
September 16, 2020
Filing Date:
September 15, 2016
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
G01F25/00; G01F17/00
Domestic Patent References:
| JP2011064707A | ||||
| JP6160152A | ||||
| JP54085062A | ||||
| JP2016090387A | ||||
| JP2016133400A | ||||
| JP6221892A | ||||
| JP8014982A | ||||
| JP63261114A | ||||
| JP2019719A |
Foreign References:
| US9058041 |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Junji Kashiwaoka
Yoshiki Kuroki
Junji Kashiwaoka