Title:
INSPECTION METHOD OF PATTERN CONNECTING PRECISION
Document Type and Number:
Japanese Patent JP2003148915
Kind Code:
A
Abstract:
To realize an inspection method of pattern connecting precision capable of precisely detecting the connecting precision in the area boundary part of exposed or drawn patterns for every plurality of areas.
A secondary electronic signal detected by scanning of charged particle beam in each inspecting area is stored as an inspection image in an image memory 44 together with its position coordinates. After the reading of images of all inspecting positions is ended, a reference image separately prepared is compared with the inspection image in an image processing unit 45, and the slippage of a field connection part or the like is detected from the relative positions of these patterns.
Inventors:
SAITO MANABU
Application Number:
JP2001347745A
Publication Date:
May 21, 2003
Filing Date:
November 13, 2001
Export Citation:
Assignee:
JEOL LTD
International Classes:
G01N21/956; G06F17/50; G06T1/00; G06T7/00; G06T7/60; G06V10/98; H01L21/027; G01B11/00; H01L21/66; (IPC1-7): G01B11/00; G01N21/956; G06T1/00; G06T7/00; G06T7/60; H01L21/027; H01L21/66