Title:
INSPECTION METHOD OF SEMICONDUCTOR DEVICE AND DEVICE THEREOF
Document Type and Number:
Japanese Patent JPH11231022
Kind Code:
A
Abstract:
To increase the number of semiconductor devices which can be simultaneously inspected, without increasing the number of drivers of a tester.
This is the inspection method of semiconductor devices in which the terminals of drivers 3a, 3b of a tester 1 are connected to the signal terminals of semiconductor devices 4a-4d in a probe card 2, and the semiconductor devices 4a-4d are inspected. Hereat, the terminal of one driver 3a, 3b of the tester 1 is connected to a branch point 5a, 5b provided in the probe card 2, the branch point 5a, 5b is connected to the signal input terminals of a plurality of the semiconductor devices 4a-4d, and a plurality of the semiconductor devices 4a-4d are simultaneously inspected by the one driver 3a, 3b.
Inventors:
ARITA MEI
Application Number:
JP3131898A
Publication Date:
August 27, 1999
Filing Date:
February 13, 1998
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
H01L21/66; G01R31/28; (IPC1-7): G01R31/28; H01L21/66
Attorney, Agent or Firm:
Miyai Akio
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