Title:
半導体力学量センサの検査方法
Document Type and Number:
Japanese Patent JP4367165
Kind Code:
B2
Abstract:
A method of inspecting a semiconductor dynamic quantity includes varying a potential applied to a peripheral fixed portion while applying predetermined potentials to fixed electrodes and to movable electrodes to vary the potential difference between the movable electrodes and the support substrate and to displace the movable electrodes in a direction perpendicular to the surface of the substrate.
Inventors:
Keisuke Goto
Application Number:
JP2004036439A
Publication Date:
November 18, 2009
Filing Date:
February 13, 2004
Export Citation:
Assignee:
株式会社デンソー
International Classes:
G01P3/44; G01P15/08; G01P21/00; G01P15/125; G01R31/08; G01R31/26; H01L21/66; H01L29/84
Domestic Patent References:
| JP10103960A | ||||
| JP2004012229A | ||||
| JP2002082127A |
Attorney, Agent or Firm:
Yoji Ito
Takahiro Miura
Fumihiro Mizuno
Takahiro Miura
Fumihiro Mizuno