INSPECTION METHOD - DISCO ABRASIVE SYSTEMS LTD

Title:

INSPECTION METHOD

Document Type and Number:

Japanese Patent JP2018077148

Kind Code:

A

Abstract:

PROBLEM TO BE SOLVED: To provide an inspection method which allows details in a processing region formed by a processing device to be clearly imaged, so as to be able to inspect the processing region.SOLUTION: An inspection method inspects a processing region by using a processing device which includes at least: holding means for holding a workpiece 12; processing means for processing a processing region of the workpiece held by the holding means; and imaging means 48 for imaging the workpiece. The inspection method includes at least: a processing region positioning step for positioning the processing region directly under the imaging means; a liquid supply step for supplying liquid WL to the processing region before or after the processing region positioning step; and an imaging step for imaging the processing region through the liquid by the imaging means.SELECTED DRAWING: Figure 4

Inventors:

NOMARU KEIJI

Application Number:

JP2016219497A

Publication Date:

May 17, 2018

Filing Date:

November 10, 2016

Export Citation:

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