PURPOSE: To accurately judge the presence or absence of mono-crystallization, in inspecting the crystallinity of a rod-shaped crystal of an inorg. compound consisting of a Group IIIb element and Group Vb element of the Periodic Table, by preliminarily roughening the surface of said crystal by sand blast.
CONSTITUTION: In inspecting the crystallinity of a rod shaped crystal of GaP as an inorg. compound consisting of a Group IIIb element and a Group Vb element of the Periodic Table and obtained by a boat growing method, fine particles comprising Al2O3 are sprayed to the rod shape crystal by compressed air to roughen the surface of said crystal. When twin polycrystal is generated by this sand blast, the interface of the crystal is clearly shown and, when a crystal defect is generated, unevenness is generated on the surface of the crystal. By this method, the presence or absence of mono-crystallization or other crystal defects can be accurately judged in a rod-shaped crystal state.
NISHIHARA EIICHIROU
FUJII KATSUSHI
FUJISHIMA SHIGEO
