To provide an inspection support device for a semiconductor chip which can inspect a normal chip without making it inoperable at the time of performing pair measurement.
The inspection support device for a semiconductor chip comprises a data processing device (2), and an output unit (4). The data processing device (2) inputs image data showing two or more normal chips which exist on a semiconductor wafer, and an abnormal chip. The data processing device (2) comprises a creator (6) and a retrieval processor (7). On the basis of the image data, the creator (6) generates the connection propriety data for forbidding the connection with the abnormal chip to each of the two or more normal chips. On the basis of the image data and the connection propriety data, the retrieval processor (7) retrieves a chip which may perform pair measurement to each of the two or more normal chips so as to output the retrieval results to the output unit (4).
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