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Patent Searching and Data


Title:
INSPECTION SUPPORT DEVICE FOR SEMICONDUCTOR CHIP
Document Type and Number:
Japanese Patent JP2006134965
Kind Code:
A
Abstract:

To provide an inspection support device for a semiconductor chip which can inspect a normal chip without making it inoperable at the time of performing pair measurement.

The inspection support device for a semiconductor chip comprises a data processing device (2), and an output unit (4). The data processing device (2) inputs image data showing two or more normal chips which exist on a semiconductor wafer, and an abnormal chip. The data processing device (2) comprises a creator (6) and a retrieval processor (7). On the basis of the image data, the creator (6) generates the connection propriety data for forbidding the connection with the abnormal chip to each of the two or more normal chips. On the basis of the image data and the connection propriety data, the retrieval processor (7) retrieves a chip which may perform pair measurement to each of the two or more normal chips so as to output the retrieval results to the output unit (4).


Inventors:
TAKAHASHI YASUNAO
Application Number:
JP2004319922A
Publication Date:
May 25, 2006
Filing Date:
November 02, 2004
Export Citation:
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Assignee:
ELPIDA MEMORY INC
International Classes:
H01L21/66; G01R31/26
Attorney, Agent or Firm:
Minoru Kudo