Title:
INSPECTION SYSTEM
Document Type and Number:
Japanese Patent JP2019020365
Kind Code:
A
Abstract:
To detect abnormality of an inspection object with higher accuracy.SOLUTION: An inspection system according to one embodiment of the present invention comprises: a facial illumination unit for adding cyclical temporal and spatial changes of light intensity; an image generation unit for generating phase image data from complex time correlation image data outputted as a result of imaging an inspection object plane from a time correlation camera or an imaging system that performs equivalent operation thereto; an image data processing unit for generating restored phase image data from the complex time correlation image data using a Wiener filter; a correction unit which, when correcting detection accuracy on the basis of a change amount of phase calculated from a phase limited differential value of phase image data, corrects detection sensitivity for the image data based on the complex time correlation image data on the basis of a change amount of phase of the restored phase image data; and a detection processing unit for detecting abnormality in a region of the inspection object plane, where its detection accuracy is corrected, of image data based on the complex time correlation image data, on the basis of a distribution of a phase of the phase image data.SELECTED DRAWING: Figure 1
Inventors:
INOUE YASUYUKI
AKAZAWA KEIICHI
KURIHARA TORU
AKAZAWA KEIICHI
KURIHARA TORU
Application Number:
JP2017141951A
Publication Date:
February 07, 2019
Filing Date:
July 21, 2017
Export Citation:
Assignee:
RICOH ELEMEX CORP
KOCHI PREFECTURAL PUBLIC UNIV CORP
KOCHI PREFECTURAL PUBLIC UNIV CORP
International Classes:
G01N21/88; G01B11/00; G06T7/00
Domestic Patent References:
| JP2015200632A | 2015-11-12 | |||
| JP2003177102A | 2003-06-27 | |||
| JP2017101979A | 2017-06-08 | |||
| JPH04174306A | 1992-06-22 | |||
| JP2017101977A | 2017-06-08 | |||
| JP2004216743A | 2004-08-05 |
Foreign References:
| US20150300816A1 | 2015-10-22 |
Attorney, Agent or Firm:
Sakai International Patent Office