Title:
INSTRUMENT FOR MEASURING TEMPERATURE OF SUBSTRATE
Document Type and Number:
Japanese Patent JPH07151606
Kind Code:
A
Abstract:
PURPOSE: To provide a measuring instrument which can accurately measure the temperature of a substrate heated by the irradiation with light with high response and has excellent durability at high temperatures and a long service life.
CONSTITUTION: The front end section of a light guiding member 12 is inserted into a heat mediating member 14 which is formed of a light shielding material having fixed emissivity and has a closed front end section and the energy radiated from the heat mediating member 14 which is heated to the same temperature as that of a substrate 24 by thermal conduction from the substrate 24 is detected by transfer the energy to a radiation thermometer through the light guiding member 12.
Inventors:
CHIBA TAKATOSHI
TAKAHASHI MITSUKAZU
NISHII KIYOBUMI
NISHIDA MASAKI
TAKAHASHI MITSUKAZU
NISHII KIYOBUMI
NISHIDA MASAKI
Application Number:
JP32992393A
Publication Date:
June 16, 1995
Filing Date:
November 29, 1993
Export Citation:
Assignee:
DAINIPPON SCREEN MFG
International Classes:
G01R31/26; G01J5/00; G01J5/08; G01R31/00; H01L21/22; H01L21/26; H01L21/66; (IPC1-7): G01J5/08; G01R31/00; G01R31/26; H01L21/26; H01L21/66
Attorney, Agent or Firm:
Mamiya Takeo