To provide an instrument that can easily and precisely measure the shape of a spot formed by means of a condenser lens etc., used for pickup devices.
The observational light from a spot image formed by making the inspecting light from a laser light source 102 incident on an objective lens 101 to be inspected is reflected by a half mirror 51 through an objective lens 31, image forming lens 41, etc., and made incident on an alignment camera 54. Then centering is performed so that the spot of the observational light may be made incident on the center of the angle of view of the alignment camera 54 by moving an X-Y stage 21b installed on a supporting stage 21. Thereafter, the camera 54 is switched to a measuring camera 74 in image reading and centering is performed so that the spot image of the observational light may be made incident on the center of the angle of view of the camera 74 by again moving the X-Y stage 21b.
NOZAKI AKITOSHI
YAGI KATSUYA
FUJII HIDEYUKI
Haruhito Oishi
Yoshihiro Fujimoto
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