PURPOSE: To obtain an insulating member excellent in heat resistance, insulation resistance, resistance against a temperature gradient, and mechanical strength so as to make the insulating member employable in vacuum by forming a base with either one material selected from Mo, Nb and so on, and forming an insulating layer into a ceramics thin film in single layer a predetermined thickness, selected from SiC, Si3N4 and the like.
CONSTITUTION: A material for a base 1 is either one selected from metals excellent in heat resistance Mo, Nb, Ta and W and ceramics sintered bodies such as AlN, SiC, Si3N4 in consideration of adhesiveness to an insulating layer 2, a thermal expansion coefficient and so on. As a material for ceramics constituting the insulating layer 2, SiC, Si3N4, AlN and diamond having a high electric insulating property and excellent heat resistance are preferable. The thickness of the insulating layer 2 ranges from 1μm to 500μm. There is possibility of energization due to a pin hole or unevenness of a coating film of the thickness is under 1μm. Meanwhile, a mechanical property approaches the property of a bulk ceramics so that there occurs an inconvenience of the thickness exceeds 500μm. Therefore, the insulating member can be utilized in the severe environments such as a high temperature, a high voltage, a high temperature gradient, an impact load and the like.
MURAKAMI YOSHIO
YASHIKI TETSUO
FUJIMORI NAOHARU
IKEGAYA AKIHIKO
SUMITOMO ELECTRIC INDUSTRIES
| JPS62216972A | 1987-09-24 |