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Patent Searching and Data


Title:
INSULATION FILM, LAMINATED BODY, AND SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JP2012077176
Kind Code:
A
Abstract:

To provide an insulation film having a low dielectric constant, high adhesion with a substrate (a member on which the insulating film is formed), high reliability, and high yield during manufacturing.

This insulation film is formed using a composition containing a polymerizable compound having a partial structure including an adamantane type basket structure in a molecule and a polymerizable reactive group contributing to polymerizable reaction and/or polymer where the polymerizable compound is polymerized partially. The linear expansion coefficient of the insulation film in the surface direction is 9×10-6K-1 or higher and 25×10-6K-1 or lower. The polymerizable reactive group of the polymerizable compound contains an aromatic ring, and an ethynyl group or vinyl group directly bonded to the aromatic ring. In the polymerizable compound, preferably, the number of carbons originating in the aromatic ring is 15% or more and 38% or less of the number of carbons in the whole polymerizable compound.


Inventors:
ONO KOJI
NAKAJIMA MICHIO
Application Number:
JP2010222986A
Publication Date:
April 19, 2012
Filing Date:
September 30, 2010
Export Citation:
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Assignee:
SUMITOMO BAKELITE CO
International Classes:
C08J5/18; B32B9/00; C08F12/34; C08F38/00
Attorney, Agent or Firm:
Tatsuya Masuda
Kazuo Asahi