INTEGRATED CAPACITY CONVERTER

Japanese Patent JPH06217397

A

PURPOSE: To obtain an easily chargeable homogeneous electret structure having an excellent charge holding property by arranging a fixed plate in a movable section and providing a first conductive layer in which an electret which is separated from a film having a movable section by an interspace is buried in an insulator. CONSTITUTION: A capacitive transducer 1 incorporates an upper plate 2 having first electrodes 4, an intermediate plate 6 having second fixed electrodes 8, and a lower plate 10 which forms a supporting structure for whole body composed of two plates 2 and 6 on one side and the rear chamber 12 of the transducer 1 on the other side. The intermediate plate 6 is fixed to the upper plate 14 with insulating spacers 14 and the plate 2 is fixed to the supporting structure 10 by its peripheral section. The spacers 14 separate the upper plate 14 from the intermediate plate 6 by providing an opened space 16 between the two plates 2 and 6 and electrically insulates the plates 2 and 6 from each other. The upper plate 6 has a frame 18 carries the electrodes 4 extended into the frame 18. The intermediate plate 6 is provided with an electret 30 having a first conductive layer 32 buried between two layers 34 and 36 of an insulating material separately from the electrode 8. The electret is extended along the film of the plate 2.

JIYANNMARUKU MORE
YOHAN BIRUHERUMU BAAKUBISHIYUT

JP22538793A

August 05, 1994

September 10, 1993

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SUISSE ELECTRONIQUE MICROTECH

H01L41/08; H04R19/00; H04R19/01; H04R19/04; H04R25/00; (IPC1-7): H04R19/04; H01L41/08

Shoichi Ui (4 others)

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