Title:
【発明の名称】集積回路装置およびその製造方法
Document Type and Number:
Japanese Patent JP3254703
Kind Code:
B2
Abstract:
A method of forming a planar storage capacitor element having a noble metal or noble metal alloy top electrode (22), a layer of lead zirconate titanate (22), and a noble metal or noble metal alloy bottom electrode (16, 18).
Inventors:
Paul J. Sur
Lee cama dinner
William El Larson
Steve De Trainer
Lee cama dinner
William El Larson
Steve De Trainer
Application Number:
JP32776691A
Publication Date:
February 12, 2002
Filing Date:
December 11, 1991
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
H01L27/04; H01G4/224; H01G7/06; H01L21/02; H01L21/822; H01L21/8242; H01L21/8246; H01L27/10; H01L27/105; H01L27/108; (IPC1-7): H01L27/105; H01L21/822; H01L21/8242; H01L27/04; H01L27/108
Domestic Patent References:
| JP4221848A | ||||
| JP4199746A |
Attorney, Agent or Firm:
Masatake Shiga (2 outside)
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