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Title:
INTEGRATED CIRCUIT
Document Type and Number:
Japanese Patent JP2004289042
Kind Code:
A
Abstract:

To realize an integrated circuit which can increase its operating speed, enhance its functions, and can reduce the number of elements.

Fine vacuums tube elements and other electronic components are integrally formed on a semiconductor substrate to allow transfer of signals between the vacuum tube elements and the electronic components.


Inventors:
MIURA AKIRA
KOBAYASHI SHINJI
HARA HITOSHI
YAGIHARA TAKESHI
OKA SADAJI
Application Number:
JP2003081903A
Publication Date:
October 14, 2004
Filing Date:
March 25, 2003
Export Citation:
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Assignee:
YOKOGAWA ELECTRIC CORP
International Classes:
H01J1/15; H01J21/00; H01J21/04; H01J40/12; H01J40/16; H01L21/822; H01L27/04; H02J3/00; H03M1/36; (IPC1-7): H01L21/822; H01J1/15; H01J21/04; H01J40/12; H01J40/16; H01L27/04