Title:
集積された磁気浮揚及び回転装置
Document Type and Number:
Japanese Patent JP4165903
Kind Code:
B2
Abstract:
A rotary motor and a rotary magnetic bearing are integrated in a compact assembly (10) that is contactless. A stator assembly (16) surrounds a ferromagnetic rotor (18) with an annular air gap (20) which can accommodate a cylindrical wall (12e), e.g. of a chamber (12), for semiconductor wafer (14) processing. The stator assembly (16) has a permanent magnet or magnets (38) sandwiched between vertically spaced magnetic stator plates (36) with plural pole segments (36a). The rotor (18) is preferably a ring of magnetic stainless steel with complementary pole teeth (18c). The stator assembly (16) levitates and passively centres the rotor (18) along a vertical axis and against tilt about the either horizontal axis (26,28), provides a radial position bias for the rotor (18), and establishes a motor flux field at a the rotor poles (18c). Polyphase coils (40) wound on the stator plates (36) produce a rotating flux field that drives the rotor (18) as a synchronous homopolar motor. A controller (54) energizes control coils (42) wound on each stator pole segment (36a) in response to a sensed physical position of the rotor (18) and can actively damp oscillations that may overcome the passive centering.
Inventors:
Nichols, Stephen Bee.
Jagan Natan, Shanker
Liary, Kevin
Eisenhower, David
Stanton, William
Richard Hockney
Downer, james
Gondole curl, Vijay
Jagan Natan, Shanker
Liary, Kevin
Eisenhower, David
Stanton, William
Richard Hockney
Downer, james
Gondole curl, Vijay
Application Number:
JP51669497A
Publication Date:
October 15, 2008
Filing Date:
October 18, 1996
Export Citation:
Assignee:
Satcon Technology Corporation
International Classes:
H02K17/08; H02K19/10; F16C39/06; H01L21/687; H02K7/09; H02K17/30; H02K21/38; H02K17/12
Domestic Patent References:
| JP53016807A | ||||
| JP59174920A |
Foreign References:
| US4043164 | ||||
| US4652820 |
Attorney, Agent or Firm:
Motohiro Kurauchi
Hiroshi Kazama
Hiroshi Kazama